High Vacuum And Coating System Specialists
Lake Industrial Estate
Shebbear
Devon
EX21 5SP
Tel +44(0)1409 281853
Fax +44(0)1409 281852
News
July 2005 | ||
| Wordentec provided a special version of the QLC 800 evaporator for Danchip. Danchip operate the National Cleanroom Facility for Micro and Nanotechnology at the Technical University of Denmark (DTU). The cryo pumped QLC800 is designed to automatically process 6 inch wafers. It can process either individually or in batches. The novel design enables multi material electron beam, thermal or sputtered thin film layers without breaking vacuum. Vacuum and process automation is achieved with Inficon IC5 deposition controller integrated with a robust PLC based system controller and colour touch screen HMI. The system features a Ferrotec multi hearth electron beam evaporator. |  | |
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