High Vacuum And Coating System Specialists

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July 2005
Wordentec ships QLC 800 Ebeam Evaporation tool to Danchip, Denmark.
Wordentec provided a special version of the QLC 800 evaporator for Danchip. Danchip operate the National Cleanroom Facility for Micro and Nanotechnology at the Technical University of Denmark (DTU). The cryo pumped QLC800 is designed to automatically process 6 inch wafers. It can process either individually or in batches. The novel design enables multi material electron beam, thermal or sputtered thin film layers without breaking vacuum. Vacuum and process automation is achieved with Inficon IC5 deposition controller integrated with a robust PLC based system controller and colour touch screen HMI. The system features a Ferrotec multi hearth electron beam evaporator.
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