In some existing production applications it is not always acceptable to replace the
tried and tested Balzers guns when considerable effort will be required to optimise the
process with the new guns.
We can now offer a high voltage upgrade that enables the ESQ 110 and 113 guns to be retained,
maintaining the pre-upgrade chamber geometry
The upgrade package replaces the EHV110 control rack.
The package comprises a modern solid state switch mode power supply,
digital scan generator, filament transformer, crucible indexer,
and high voltage feedthroughs.
The upgrade features tried and tested air cooled Ferrotec Carrera solid state high voltage generators, as used on our regular systems.
Delivery power up to 12 kW can be provided.
Our demonstration system, fitted with this upgrade is available for process evaluation.
Please call to book a visit
Download Datasheet
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