High Vacuum And Coating System Specialists

Lake Industrial Estate
Shebbear
Devon
EX21 5SP

Tel  +44(0)1409 281853
Fax +44(0)1409 281852

The WAVE 800 EBeam Evaporator
At the heart of the WAVE800 system is a process chamber that is geometrically identical to the original Balzers BAK 760.
The chamber includes additional features consistent with modern instrumentation yet remains fully compatible with existing 760 tooling and accessories.
The WAVE control system handles process recipe editing and execution plus full system parameter datalogging.
The WAVE system has an embedded Inficon quartz crystal measurement system compatible with single or multiple crystals. WAVE communicates with a wide range of system components via an industrial field bus system together with RS232 and ethernet comms to ensure precise layer thickness and rate, excellent uniformity, and a superior production yield
The all new WAVE 800 for precision optical thin film coatings
Dual source configuration
Source Specification
Source 1Ferrotec EV M10 (8 crucibles)
Source 2 Ferrotec EV M10 (single crucible)
Power SupplyFerrotec Carrera 6
Source ControllerGenius PRO
Dimensions
Chamber Size L x W x H950mm x 888mm x 923mm
Substrate Carrier 800mm
Source to Substrate 696mm
Wafer Guide
Maximum number 4" (101.6mm) wafers40
Maximum number 5" (127.0mm) wafers30
Maximum number 6" (152.4mm) wafers24
Maximum number 8" (203.2mm) wafers8
Performance
High Vacuum PumpOnBoard 400 cryo pump
Pump down time10 minutes
Ultimate Pressure5.0 x10E-08
Maximum Temperature300 degrees max
Chamber Cooling7 channel with heating