System Upgrade Balzers BAK 600
The BAK 600 high vacuum deposition System is suitable for small to medium capacity requirements. The wide range of applications in the field of electronics and opto-electronics make the BAK 600 system ideal for applications in research, development and production.
The old control system is discarded and replaced with a new PLC based system bringing this system up to modern standards of reliability and repeatability.
As an independent specialist system integrator, Wordentec is free to select components and configure any system to precisely meet our customers requirements.
"Cost Effective low risk coating system availble now from stock"
Dual thermal source
|Source 1||Thermal 800amp |
|Source 2 ||Thermal 800amp |
|Power Supply|| |
|Source Controller|| |
|Chamber Size L x W x H||652 x 573 x 697 mm |
|Substrate Carrier ||600mm |
|Source to Substrate ||550mm |
|Maximum number 4" (101.6mm) wafers||21 |
|Maximum number 5" (127.0mm) wafers||9 |
|Maximum number 6" (152.4mm) wafers||7 |
|Maximum number 8" (203.2mm) wafers||5 |
|High Vacuum Pump||Diffusion |
|Pump down time||1.5E-05 30min |
|Ultimate Pressure||5.5E-07 |
|Maximum Temperature||350max |
|Chamber Cooling||6 channel |