System Upgrade BAK 760
The Balzers BAK coating systems are industry standard electron beam evaporators widely used in electronic and optical coating processes worldwide. Many systems manufactured during the 1970’s and 80’s have provided exceptional service but are becoming increasingly difficult to support due to obsolete components and antiquated controls. Recognising the overwhelming need for reliable manufacturing tools, Wordentec has introduced an upgrade program that retains the tried and tested evaporation chamber together with proven tooling, but enables integration of modern evaporation sources, reliable switch mode power generators and robust industrial PLC controls.
"The industry standard electron beam evaporator"
Single Gun Configuration
Source Specification | Source 1 | Ferrotec EV M 8 |
| Source 2 | |
| Power Supply | Carerra |
| Source Controller | Genius |
Dimensions | Chamber Size L x W x H | 950 x 888 x923mm |
| Substrate Carrier | 800mm |
| Source to Substrate | 696mm |
Wafer Guide | Maximum number 4" (101.6mm) wafers | 40 |
| Maximum number 5" (127.0mm) wafers | 30 |
| Maximum number 6" (152.4mm) wafers | 24 |
| Maximum number 8" (203.2mm) wafers | 8 |
Performance | High Vacuum Pump | Cryo + Polycold |
| Pump down time | 10 minutes |
| Ultimate Pressure | 5.0x10E-08 |
| Maximum Temperature | 300 max |
| Chamber Cooling | 8 channel |
