High Vacuum And Coating System Specialists

Lake Industrial Estate
Shebbear
Devon
EX21 5SP

Tel  +44(0)1409 281853
Fax +44(0)1409 281852

System Upgrade BAK 760
The Balzers BAK coating systems are industry standard electron beam evaporators widely used in electronic and optical coating processes worldwide. Many systems manufactured during the 1970ís and 80ís have provided exceptional service but are becoming increasingly difficult to support due to obsolete components and antiquated controls. Recognising the overwhelming need for reliable manufacturing tools, Wordentec has introduced an upgrade program that retains the tried and tested evaporation chamber together with proven tooling, but enables integration of modern evaporation sources, reliable switch mode power generators and robust industrial PLC controls.
"The industry standard electron beam evaporator"
Single Gun Configuration
Source Specification
Source 1Ferrotec EV M 8
Source 2
Power SupplyCarerra
Source ControllerGenius
Dimensions
Chamber Size L x W x H950 x 888 x923mm
Substrate Carrier 800mm
Source to Substrate 696mm
Wafer Guide
Maximum number 4" (101.6mm) wafers40
Maximum number 5" (127.0mm) wafers30
Maximum number 6" (152.4mm) wafers24
Maximum number 8" (203.2mm) wafers8
Performance
High Vacuum PumpCryo + Polycold
Pump down time10 minutes
Ultimate Pressure5.0x10E-08
Maximum Temperature300 max
Chamber Cooling8 channel