High Vacuum And Coating System Specialists

Lake Industrial Estate
Shebbear
Devon
EX21 5SP

Tel  +44(0)1409 281853
Fax +44(0)1409 281852

System Upgrade BAS 450
Up to 3 planar magnetron cathodes 5 x 10 Substrate Heating Available from stock, the BAS 450PM coating system. Capacity
  • 24 3-inch substrates
  • 9 4-inch substrates
  • 8 125 mm Pseudo Square
The cylindrical processing chamber with a diameter of 445 mm and a height of 500 mm is made of stainless steel. The outside of the chamber is fitted with brazed-on half round pipes for heating and cooling. In addition to a sight glass in the front of the chamber, there are other ports for fitting the gas inlet and feedthroughs for the anodes. The processing chamber has 4 flanges for mounting the planar magnetron cathodes and the substrate heaters.
"Economical spuutering plant for research, development and small scale production"

Source Specification
Source 1127x 254mm
Source 2 127x 254mm
Power Supply
Source Controller
Dimensions
Chamber Size L x W x H445x500
Substrate Carrier drum coater
Source to Substrate
Performance
High Vacuum PumpDiffusion
Pump down time1.0E-06
Ultimate Pressure
Maximum Temperature300 max
Chamber Cooling4 channel