HiTUS® High Density Plasma
The high-density plasma method of thin film sputtering developed by Plasma Quest Limited
provides process and thin film deposition benefits not currently available from conventional systems.
The programmable Genius deposition controller regulates all aspects of the
electron beam deposition process. As well as controlling the high voltage and
regulating the filament supply,
the Genius also handles the magnet current supply to the coils of the electron beam evaporator.