During the upgrade all seals are replaced. In all upgrade work we always use high quality, high temperature viton seals.
If we are using an existing rotary substrate drive the bearings are changed and any worn parts are renewed.
The drive motor is replaced with a modern inverter driven unit. Our preferred option is to fit the Wordentec X5 planetary drive
system or our latest iteration of the traditional Balzers BD104. Valves, vacuum pipework and valve actuators are also replaced.
The coating sources are installed to the agreed layout. These can be the re-conditioned sources we removed from the system or
they can be new evaporators. We can install any combination of electron beam guns, thermal sources and sputter sources, the only
limiting factor is the available space. We replace the shutter drives and switches with new Wordentec rotary actuators with non-contact limit switches.
We can accommodate ion and plasma sources for ion assisted deposition, front or rear surface heating can also be installed.
All vacuum feedthroughs are replaced as necessary, any blank feedthroughs are fitted with new blanking plugs, all nuts and washers are
replaced with new. We fit all front surface heater connectors with high current, quick connect plugs made by Lemo. This allows the operator to quickly
remove the heaters for chamber cleaning.
The chamber base is populated with the process gas installation. The mass flow controllers and isolation valves are plumbed in with
stainless steel VCR fittings. The high voltage and heater feedthroughs are connected to their transformers, all of which are earthed
to the inter-connecting earth busbar. The cabling is tucked away neatly in dedicated trunking. The compressed air pipes, water pipes
and connections are labelled and made to the coating sources. This is a secure cabinet. It is locked and protected by our dual channel
safety monitoring system.
Finally, new shielding is fitted and checked for ease of installation.
