The system now goes through rigorous testing to ensure all the component parts work as they should.
There is always some fine tuning of shutter speed and positioning along with crucible alignment and substrate rotation speed.
We then work to ensure the system is set up correctly for its intended the range of processes. This begins with setting up the beam position
and scan patterns, we check that the substrate heating system is accurate and does not overshoot its setpoint. We make sure all peripheral equipment
is communicating the correct values to our controller and that the cooling water flow is distributed around the system correctly without leaks.
A series of individual layers are evaporated from each source in turn to check that there is a good rate and that the measured thicknesses we see
are correct. Once we know that each source can correctly perform a long single layer we can program the system to run its multi-layer processes.
Normally, there is an agreed process that we run at our facility prior to sign off. We invite the customer to spend some time at our
facility to complete this. The factory sign off is a fantastic opportunity for the system operators to get some time working with our controls
before delivery. We offer to provide as much training as needed to ensure that the operators of the system have a seamless transition to using the
Wave software.
Upon completion the system is carefully disconnected, re-packed and shipped on dedicated transport back to the customer.
Our skilled installation team will follow to re-install the machine and repeat the sign off process. The Wordentec installation team,
work with the system operators and maintenance technicians to provide training and any help needed in order to ensure that the project is a
complete success.
